Rapid Thermal Processing: Science and Technology - Fair - Books - Elsevier Science Publishing Co Inc - 9780122476907 - April 15, 1993
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Fair
Rapid Thermal Processing: Science and Technology

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Discusses rapid thermal processing (RTP), an essential manufacturing technology for single-wafer processing in highly controlled environments. The text provides information on the suitability of RTP for thin film deposition, junction formation, silicides, epitaxy and "in situ" processing.

430 pages

Media Books     Hardcover Book   (Book with hard spine and cover)
Released April 15, 1993
ISBN13 9780122476907
Publishers Elsevier Science Publishing Co Inc
Pages 430
Dimensions 152 × 229 × 25 mm   ·   725 g
Editor Fair, Richard B.

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