Handbook of Silicon Based MEMS Materials and Technologies - Micro & Nano Technologies - Markku Tilli - Books - Elsevier Science Publishing Co Inc - 9780128177860 - April 17, 2020
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Markku Tilli
Handbook of Silicon Based MEMS Materials and Technologies - Micro & Nano Technologies 3rd edition

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1104 pages

Media Books     Paperback Book   (Book with soft cover and glued back)
Released April 17, 2020
ISBN13 9780128177860
Publishers Elsevier Science Publishing Co Inc
Pages 1026
Dimensions 275 × 216 × 54 mm   ·   2.33 kg
Editor Lindroos, Veikko (Professor Emeritus, Physical Metallurgy and Materials Science, Aalto University, Finland)
Editor Motooka, Teruaki (Professor Emeritus, Department of Materials Science and Engineering, Kyushu University, Japan)
Editor Paulasto-Kroeckel, Mervi (Aalto University, School of Electrical Engineering, Finland)
Editor Petzold, Matthias (Professor, Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Germany)
Editor Theuss, Horst (Lead Principal, Infineon Technologies, AG, Germany)
Editor Tilli, Markku (Director and Senior Vice President of Research, Okmetic, Finland (retired))

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