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Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine Products Taniguchi
Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine Products
Taniguchi
The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometre range (approximately three atomic lattice spacings). This book examines the technology and systems needed to achieve this level of accuracy. It is written by the leading researchers in Japan, that is: the world leaders.
406 pages, halftones, numerous line figures, tables
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | July 25, 1996 |
| ISBN13 | 9780198562832 |
| Publishers | Oxford University Press |
| Pages | 422 |
| Dimensions | 194 × 253 × 27 mm · 1.01 kg |
| Editor | Taniguchi, Norio (Professor Emeritus, Professor Emeritus, Tokyo Science University) |
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