Fabrication Engineering at the Micro- and Nanoscale - The Oxford Series in Electrical and Computer Engineering - Stephen A. Campbell - Books - Oxford University Press Inc - 9780199861224 - November 15, 2012
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Stephen A. Campbell
Fabrication Engineering at the Micro- and Nanoscale - The Oxford Series in Electrical and Computer Engineering 4 Revised edition

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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

688 pages, black & white illustrations, black & white tables, figures

Media Books     Paperback Book   (Book with soft cover and glued back)
Released November 15, 2012
ISBN13 9780199861224
Publishers Oxford University Press Inc
Pages 688
Dimensions 236 × 192 × 26 mm   ·   1.08 kg
Language English  

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