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Electron Beam Testing Technology - Microdevices John T L Thong 1993 edition
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Electron Beam Testing Technology - Microdevices
John T L Thong
Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing.
Marc Notes: Includes bibliographical references and index. Table of Contents: Background to Electron Beam Testing; W. C. Nixon. Introduction; J. T. L. Thong. Principles and Applications; J. T. L. Thong. Essential Electron Optics; A. R. Dinnis. Electron Beam Interaction with Specimen; K. Ura. Electron Spectrometers and Voltage Measurements; L. Dubbeldam. High Speed Techniques; J. T. L. Thong. Picosecond Photoemission Probing; H. Beha, R. Clauberg. Signal and Image Processing; F. M. Boland, E. R. Lynch. System Integration; M. Battu, et al. Practical Considerations in Electron Beam Testing; T. J. Aton. Industrial Case Studies; D. W. Ranasinghe, et al. Index."
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | July 31, 1993 |
| ISBN13 | 9780306443602 |
| Publishers | Springer Science+Business Media |
| Pages | 462 |
| Dimensions | 178 × 254 × 32 mm · 1.05 kg |
| Editor | Thong, John T.L. |
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