Beam Technologies for Integrated Processing - National Research Council - Books - National Academies Press - 9780309046350 - 1992
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Beam Technologies for Integrated Processing


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Beam technologies play an important role in microelectronic component fabrication. This volume identifies various beam technologies and their applications in electronics and other manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.

Media Books     Paperback Book   (Book with soft cover and glued back)
Released 1992
ISBN13 9780309046350
Publishers National Academies Press
Pages 106
Dimensions 216 × 279 × 25 mm   ·   310 g
Language English  

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