Database Needs for Modeling and Simulation of Plasma Processing - National Research Council - Books - National Academies Press - 9780309055918 - October 21, 1996
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National Research Council
Database Needs for Modeling and Simulation of Plasma Processing

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In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation.

74 pages

Media Books     Paperback Book   (Book with soft cover and glued back)
Released October 21, 1996
ISBN13 9780309055918
Publishers National Academies Press
Pages 74
Dimensions 216 × 279 × 25 mm   ·   234 g
Language English  

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