Microelectromechanical Systems: Advanced Materials and Fabrication Methods National Research Council
Microelectromechanical Systems: Advanced Materials and Fabrication Methods
National Research Council
Microelectromenchanical systems (MEMS) is a field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. MEMS is a multidisciplinary field involving challenges and opportunities for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry.
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | December 1, 1997 |
| ISBN13 | 9780309059800 |
| Publishers | National Academies Press |
| Pages | 76 |
| Dimensions | 216 × 279 × 25 mm · 301 g |
| Language | English |
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