EUV Lithography - Vivek Bakshi - Books - John Wiley & Sons Inc - 9780470471555 - January 16, 2009
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Vivek Bakshi
EUV Lithography

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EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

700 pages, illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released January 16, 2009
ISBN13 9780470471555
Publishers John Wiley & Sons Inc
Pages 702
Dimensions 191 × 259 × 45 mm   ·   1.58 kg

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