Glow Discharge Processes: Sputtering and Plasma Etching - Chapman, Brian (Burroughs Corp.) - Books - John Wiley & Sons Inc - 9780471078289 - September 25, 1980
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Chapman, Brian (Burroughs Corp.)
Glow Discharge Processes: Sputtering and Plasma Etching

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Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals.

432 pages, illustrations, bibliography, index

Media Books     Hardcover Book   (Book with hard spine and cover)
Released September 25, 1980
ISBN13 9780471078289
Publishers John Wiley & Sons Inc
Pages 432
Dimensions 241 × 163 × 31 mm   ·   743 g
Language English  

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