Spectroscopic Ellipsometry and Reflectometry: A User's Guide - Tompkins, Harland G. (Motorola, Inc.) - Books - John Wiley & Sons Inc - 9780471181729 - April 6, 1999
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Tompkins, Harland G. (Motorola, Inc.)
Spectroscopic Ellipsometry and Reflectometry: A User's Guide

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While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry.

248 pages, Illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released April 6, 1999
ISBN13 9780471181729
Publishers John Wiley & Sons Inc
Pages 248
Dimensions 237 × 163 × 19 mm   ·   516 g
Language English  

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