Specialty Gas Analysis: A Practical Guidebook - JD Hogan - Books - John Wiley & Sons Inc - 9780471185987 - December 1, 1996
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JD Hogan
Specialty Gas Analysis: A Practical Guidebook

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The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis.

200 pages, appendices, index

Media Books     Hardcover Book   (Book with hard spine and cover)
Released December 1, 1996
Original release date 1997
ISBN13 9780471185987
Publishers John Wiley & Sons Inc
Pages 200
Dimensions 161 × 241 × 16 mm   ·   503 g
Editor Hogan, Jeremiah D.

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