Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - David Attwood - Books - Cambridge University Press - 9780521029971 - February 22, 2007
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David Attwood
Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications

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This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.

504 pages, 255 b/w illus.

Media Books     Paperback Book   (Book with soft cover and glued back)
Released February 22, 2007
ISBN13 9780521029971
Publishers Cambridge University Press
Pages 504
Dimensions 180 × 253 × 27 mm   ·   1.04 kg   (Weight (estimated))

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