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Ion Implantation: Basics to Device Fabrication - The Springer International Series in Engineering and Computer Science Emanuele Rimini 1995 edition
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Ion Implantation: Basics to Device Fabrication - The Springer International Series in Engineering and Computer Science
Emanuele Rimini
Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics.
406 pages, biography
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