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Electron-Beam X-Ray Euv and Ion-Beam Submicrometer Lithographies For Manufacturing Vi- Seeger
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Electron-Beam X-Ray Euv and Ion-Beam Submicrometer Lithographies For Manufacturing Vi-
Seeger
420 pages
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | May 31, 1997 |
| ISBN13 | 9780819420992 |
| Publishers | SPIE Press |
| Pages | 420 |
| Dimensions | 150 × 220 × 10 mm · 697 g (Weight (estimated)) |
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