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Metrology, Inspection, and Process Control for Microlithography: XIII (Proceedings of SPIE) Singh
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Metrology, Inspection, and Process Control for Microlithography: XIII (Proceedings of SPIE)
Singh
1052 pages, illustrations
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | June 30, 1999 |
| ISBN13 | 9780819431516 |
| Publishers | SPIE Press |
| Pages | 1052 |
| Dimensions | 150 × 220 × 10 mm · 1.74 kg (Weight (estimated)) |
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