Metrology, Inspection and Process Control for Microlithography XVII (Proceedings of SPIE) - Herr - Books - SPIE Press - 9780819448439 - June 30, 2003
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Metrology, Inspection and Process Control for Microlithography XVII (Proceedings of SPIE)


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1296 pages

Media Books     Paperback Book   (Book with soft cover and glued back)
Released June 30, 2003
ISBN13 9780819448439
Publishers SPIE Press
Pages 1296
Dimensions 150 × 220 × 10 mm   ·   2.14 kg   (Weight (estimated))

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