EUV Sources for Lithography - Press Monographs - Vivek Bakshi - Books - SPIE Press - 9780819496256 - February 28, 2006
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Vivek Bakshi
EUV Sources for Lithography - Press Monographs

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An authoritative reference book on EUV source technology. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation.

1094 pages

Media Books     Paperback Book   (Book with soft cover and glued back)
Released February 28, 2006
ISBN13 9780819496256
Publishers SPIE Press
Pages 1094
Dimensions 150 × 220 × 10 mm   ·   1.63 kg   (Weight (estimated))

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