Tell your friends about this item:
Handbook of Silicon Semiconductor Metrology 1st edition
Price
Íkr 63,159
excl. VAT
Ordered from remote warehouse
Expected delivery Jul 29 - Aug 12
Our customers say:
Add to your iMusic wish list
Handbook of Silicon Semiconductor Metrology
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, overlay, and dopant dose.
896 pages
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | June 29, 2001 |
| ISBN13 | 9780824705060 |
| Publishers | Taylor & Francis Inc |
| Pages | 894 |
| Dimensions | 185 × 257 × 49 mm · 1.65 kg |
| Language | English |
| Editor | Diebold, Alain C. |
