Particle Control for Semiconductor Manufacturing - R.P. Donovan - Books - Taylor & Francis Inc - 9780824782429 - January 26, 1990
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Particle Control for Semiconductor Manufacturing 1st edition


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There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In


480 pages

Media Books     Hardcover Book   (Book with hard spine and cover)
Released January 26, 1990
ISBN13 9780824782429
Publishers Taylor & Francis Inc
Pages 480
Dimensions 150 × 220 × 20 mm   ·   1.09 kg
Language English  

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