Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies - Badih El-Kareh - Books - Springer-Verlag New York Inc. - 9781441942241 - October 29, 2010
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Badih El-Kareh
Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies Softcover reprint of hardcover 1st ed. 2009 edition

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Compiled from industrial and academic lecture notes and reflecting years of experience in the development of silicon devices, this book covers both their theoretical and practical aspects, and how their electrical properties and processing conditions interact.

598 pages, 17 black & white tables, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released October 29, 2010
ISBN13 9781441942241
Publishers Springer-Verlag New York Inc.
Pages 598
Dimensions 155 × 235 × 31 mm   ·   861 g
Language English  

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