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The Physics of Microfabrication Ivor Brodie Softcover reprint of the original 1st ed. 1982 edition
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The Physics of Microfabrication
Ivor Brodie
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years.
524 pages, black & white illustrations
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | June 26, 2013 |
| ISBN13 | 9781489921628 |
| Publishers | Springer-Verlag New York Inc. |
| Pages | 504 |
| Dimensions | 155 × 235 × 26 mm · 725 g |
| Language | English |
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