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Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology A.j. Van Roosmalen Softcover reprint of the original 1st ed. 1991 edition
Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology
A.j. Van Roosmalen
This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.
256 pages, black & white illustrations
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | May 29, 2013 |
| ISBN13 | 9781489925688 |
| Publishers | Springer-Verlag New York Inc. |
| Pages | 237 |
| Dimensions | 178 × 254 × 13 mm · 449 g |
| Language | English |