Mechanical Properties of Silicon Based Compounds Silicides - Pelleg - Books - Springer Nature Switzerland AG - 9783030225971 - July 30, 2019
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Mechanical Properties of Silicon Based Compounds Silicides 1st ed. 2019 edition

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This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. A special chapter is given on deformation in silicides in the nano scale.


274 pages, 10 Tables, color; 12 Illustrations, color; 303 Illustrations, black and white; XVI, 274 p

Media Books     Book
Released July 30, 2019
ISBN13 9783030225971
Publishers Springer Nature Switzerland AG
Pages 274
Dimensions 150 × 220 × 20 mm   ·   585 g
Language German  

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