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Ellipsometry for Industrial Applications Softcover reprint of the original 1st ed. 1988 edition
Karl Riedling
Ellipsometry for Industrial Applications Softcover reprint of the original 1st ed. 1988 edition
Karl Riedling
During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available.
112 pages, 49 black & white illustrations
Media | Books Paperback Book (Book with soft cover and glued back) |
Released | December 14, 1987 |
ISBN13 | 9783211820407 |
Publishers | Springer Verlag GmbH |
Pages | 99 |
Dimensions | 170 × 244 × 6 mm · 195 g |
Language | English |
See all of Karl Riedling ( e.g. Paperback Book )