Design for Manufacturability with Advanced Lithography - Bei Yu - Books - Springer International Publishing AG - 9783319203843 - November 23, 2015
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Bei Yu
Design for Manufacturability with Advanced Lithography 1st ed. 2016 edition

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This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).

164 pages, 9 black & white illustrations, 91 colour illustrations, 35 black & white tables, biograph

Media Books     Hardcover Book   (Book with hard spine and cover)
Released November 23, 2015
ISBN13 9783319203843
Publishers Springer International Publishing AG
Pages 164
Dimensions 155 × 235 × 11 mm   ·   426 g
Language French  

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