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Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metalli Maria Angela Pampillon Arce 1st ed. 2017 edition
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Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metalli
Maria Angela Pampillon Arce
This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.
164 pages, 6 Tables, color; 6 Illustrations, color; 110 Illustrations, black and white; XXIII, 164 p
| Media | Books Book |
| Released | October 13, 2017 |
| ISBN13 | 9783319666068 |
| Publishers | Springer International Publishing AG |
| Pages | 164 |
| Dimensions | 150 × 220 × 20 mm · 444 g |
| Language | German |
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