Micromachines as Tools for Nanotechnology - Microtechnology and MEMS - Hiroyuki Fujita - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783540008569 - July 11, 2003
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Micromachines as Tools for Nanotechnology - Microtechnology and MEMS 2003 edition

Hiroyuki Fujita

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Micromachines as Tools for Nanotechnology - Microtechnology and MEMS 2003 edition

Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology.

211 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released July 11, 2003
ISBN13 9783540008569
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 211
Dimensions 155 × 235 × 14 mm   ·   489 g
Language German  
Editor Fujita, Hiroyuki

See all of Hiroyuki Fujita ( e.g. Hardcover Book and Paperback Book )