Low Pressure Plasmas and Microstructuring Technology - Gerhard Franz - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783540858485 - April 30, 2009
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Gerhard Franz
Low Pressure Plasmas and Microstructuring Technology 2009 edition

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Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.

732 pages, 1, black & white illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released April 30, 2009
ISBN13 9783540858485
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 732
Dimensions 155 × 235 × 39 mm   ·   1.23 kg
Language English  

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