Cmos Hotplate Chemical Microsensors - Microtechnology and Mems - Markus Graf - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642089107 - November 22, 2010
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Cmos Hotplate Chemical Microsensors - Microtechnology and Mems 1st Ed. Softcover of Orig. Ed. 2007 edition

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The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.


125 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released November 22, 2010
ISBN13 9783642089107
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 125
Dimensions 234 × 156 × 7 mm   ·   224 g
Language German  

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