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Cmos Hotplate Chemical Microsensors - Microtechnology and Mems Markus Graf 1st Ed. Softcover of Orig. Ed. 2007 edition
Cmos Hotplate Chemical Microsensors - Microtechnology and Mems
Markus Graf
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
125 pages, biography
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | November 22, 2010 |
| ISBN13 | 9783642089107 |
| Publishers | Springer-Verlag Berlin and Heidelberg Gm |
| Pages | 125 |
| Dimensions | 234 × 156 × 7 mm · 224 g |
| Language | German |