Micro System Technologies 90: 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10-13 September 1990 - Herbert Reichl - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642456800 - December 4, 2014
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Herbert Reichl
Micro System Technologies 90: 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10-13 September 1990 Softcover reprint of the original 1st ed. 1990 edition

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The trend of the future development is to increase the integration density by combining the microelectronic, microoptic, and micro mechanic aspects to new complex multifunctional systems, which are able to comprise sensors, actuators, analogue and digital circuits on the same chip or on multichip-modules.

873 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released December 4, 2014
Original release date 2013
ISBN13 9783642456800
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 858
Dimensions 155 × 235 × 44 mm   ·   1.20 kg
Language German  
Editor Reichl, Herbert

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