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Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices Ulrich Hilleringmann 1st ed. 2023 edition
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Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices
Ulrich Hilleringmann
The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit.
152 pages, 170 Tables, color; 8 Illustrations, color; 165 Illustrations, black and white; VIII, 152
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | August 3, 2023 |
| ISBN13 | 9783658410407 |
| Publishers | Springer Fachmedien Wiesbaden |
| Pages | 264 |
| Dimensions | 150 × 220 × 10 mm · 563 g |
| Language | English |
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