Manufacturable Process / Tool for High-k / Metal Gate: Dielectric Stacks for Sub-45 Nm Cmos - Aarthi Venkateshan - Books - VDM Verlag Dr. Müller - 9783836481564 - November 6, 2008
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Aarthi Venkateshan
Manufacturable Process / Tool for High-k / Metal Gate: Dielectric Stacks for Sub-45 Nm Cmos

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High-k/Metal Gate technology

Media Books     Paperback Book   (Book with soft cover and glued back)
Released November 6, 2008
ISBN13 9783836481564
Publishers VDM Verlag Dr. Müller
Pages 204
Dimensions 150 × 220 × 10 mm   ·   281 g
Language English  

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