Vakuumno-plazmennye Protsessy Obrabotki Kvartsa: Issledovanie Vliyaniya Obrabotki V Razlichnykh Gazakh Na Poverkhnost' Kvartsa. - Petr Krylov - Books - LAP LAMBERT Academic Publishing - 9783844352887 - June 15, 2011
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Petr Krylov
Vakuumno-plazmennye Protsessy Obrabotki Kvartsa: Issledovanie Vliyaniya Obrabotki V Razlichnykh Gazakh Na Poverkhnost' Kvartsa. Russian edition

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V rabote opisana novaya konstruktsiya i skhema raspolozheniya katodnogo i anodnogo uzlov razrabotannoy ustanovki ionno-plazmennogo travleniya mikrostruktur so skaniruemym VCh - magnetronom, obespechivayushchie vysokie skorosti ionnogo i reaktivno-ionnogo travleniya razlichnykh materialov. Opredeleny i opisany optimal'nye rezhimy travleniya kvartsa. Vpervye predlozheno ustroystvo dlya utilizatsii khlorsoderzhashchikh gazov i (ili) izmeneniya sostava rabochego gaza. Opredeleny optimal'nye rezhimy protsessov reaktivnogo ionno-luchevogo travleniya kvartsa v razlichnykh khlorsoderzhashchikh gazakh. Issledovany vozmozhnosti ispol'zovaniya tverdotel'nogo istochnika ftora dlya ionno-luchevogo travleniya kvartsa. Opredeleny optimal'nye rezhimy ionno-luchevykh i ionno-plazmennykh protsessov polirovki kvartsa.

Media Books     Paperback Book   (Book with soft cover and glued back)
Released June 15, 2011
ISBN13 9783844352887
Publishers LAP LAMBERT Academic Publishing
Pages 144
Dimensions 150 × 9 × 226 mm   ·   233 g
Language German  

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