Micro- And Nanoelectromechanics

In modern microelectronics, the most intensively developing sector is microelectromechanical systems, MEMS. This direction is based on the latest achievements of microelectronic technologies and is aimed at creating executive micromechanisms that have previously unattainable functional capabilities. In recent years, MEMS has had a major impact on the daily lives of tens of millions of people, through the creation of new markets for mobile electronics with previously unknown consumer properties and on industries such as automotive, electronic, aerospace, medical, etc. However, to date, most specialists, developers of electronic equipment and users of high-tech devices have insufficient information about the new direction of microelectronics. The book considers the current state of this direction of microelectronics, a wide range of its practical possibilities and prospects for further development. Physical principles of MEMS functioning and their characteristics are considered. The book is intended for specialists in the field of microelectronics, informatics, and for students of technical universities.