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Plasma Processing of Semiconductors (Softcover Reprint of the Origi) P F Williams Softcover Reprint of the Original 1st Ed. 1997 edition
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Plasma Processing of Semiconductors (Softcover Reprint of the Origi)
P F Williams
Proceedings of the NATO Advanced Study Institute, Chateau de Bonas, France, 17-28 June 1996
623 pages, 101 black & white illustrations, biography
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | October 12, 2012 |
| ISBN13 | 9789401064866 |
| Publishers | Springer |
| Pages | 613 |
| Dimensions | 156 × 234 × 32 mm · 866 g |
| Editor | Williams, P. F. |
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