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Laser Heat-Mode Lithography: Principle and Methods - Springer Series in Materials Science Jingsong Wei 2019 edition
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Laser Heat-Mode Lithography: Principle and Methods - Springer Series in Materials Science
Jingsong Wei
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.
208 pages, 160 Illustrations, color; 22 Illustrations, black and white; XIII, 208 p. 182 illus., 160
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | November 29, 2019 |
| ISBN13 | 9789811509421 |
| Publishers | Springer Verlag, Singapore |
| Pages | 208 |
| Dimensions | 163 × 244 × 18 mm · 462 g |
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