Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings - B J Pawlak - Books - Cambridge University Press - 9781107408548 - June 5, 2014
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B J Pawlak
Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings

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The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

336 pages, black & white illustrations

Media Books     Paperback Book   (Book with soft cover and glued back)
Released June 5, 2014
ISBN13 9781107408548
Publishers Cambridge University Press
Pages 336
Dimensions 152 × 229 × 18 mm   ·   533 g   (Weight (estimated))
Language English  
Editor Law, M. (University of Florida)
Editor Pawlak, B. J.
Editor Pelaz, M. L. (Universidad de Valladolid, Spain)
Editor Surugo, K.

See all of B J Pawlak ( e.g. Paperback Book and Hardcover Book )