Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings - B J Pawlak - Books - Materials Research Society - 9781605110400 - October 17, 2008
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B J Pawlak
Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings

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The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

319 pages, illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released October 17, 2008
ISBN13 9781605110400
Publishers Materials Research Society
Pages 319
Dimensions 152 × 228 × 23 mm   ·   566 g
Language English  
Editor Law, M. (University of Florida)
Editor Pawlak, B. J.
Editor Pelaz, M. L. (Universidad de Valladolid, Spain)
Editor Surugo, K.

See all of B J Pawlak ( e.g. Paperback Book and Hardcover Book )