The Physics of Submicron Lithography - Microdevices - Kamil A. Valiev - Books - Springer-Verlag New York Inc. - 9781461364610 - September 27, 2012
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Kamil A. Valiev
The Physics of Submicron Lithography - Microdevices Softcover reprint of the original 1st ed. 1992 edition

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In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer.

493 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released September 27, 2012
ISBN13 9781461364610
Publishers Springer-Verlag New York Inc.
Pages 493
Dimensions 178 × 254 × 26 mm   ·   870 g
Language English  

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