Resonant MEMS: Fundamentals, Implementation, and Application - Advanced Micro and Nanosystems - Oliver Brand - Books - Wiley-VCH Verlag GmbH - 9783527335459 - April 22, 2015
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Oliver Brand
Resonant MEMS: Fundamentals, Implementation, and Application - Advanced Micro and Nanosystems

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A must-have for any MEMS R&D group: for the first time vital and hard-to-come-by knowledge is combined in one ready reference. From the principles and implementations, the book presents a unified view of resonant MEMS and their applications rather than unrelated case studies.

496 pages

Media Books     Hardcover Book   (Book with hard spine and cover)
Released April 22, 2015
ISBN13 9783527335459
Publishers Wiley-VCH Verlag GmbH
Genre Aspects (Academic) > Science / Technology Aspects
Pages 512
Dimensions 176 × 251 × 30 mm   ·   1.24 kg
Language English  
Series Editor Fedder, Gary K.
Series Editor Hierold, Christofer
Series Editor Korvink, Jan G.
Series Editor Tabata, Osamu

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