Modelling of Microfabrication Systems - Microtechnology and MEMS - Raja Nassar - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783540002529 - June 13, 2003
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Modelling of Microfabrication Systems - Microtechnology and MEMS 2003 edition

Raja Nassar

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Modelling of Microfabrication Systems - Microtechnology and MEMS 2003 edition

This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

270 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released June 13, 2003
ISBN13 9783540002529
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 270
Dimensions 155 × 235 × 17 mm   ·   562 g
Language German  

See all of Raja Nassar ( e.g. Hardcover Book and Paperback Book )