Modelling of Microfabrication Systems - Microtechnology and MEMS - Raja Nassar - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642055362 - December 8, 2010
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Raja Nassar
Modelling of Microfabrication Systems - Microtechnology and MEMS Softcover reprint of hardcover 1st ed. 2003 edition

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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

279 pages, 4 black & white illustrations, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released December 8, 2010
ISBN13 9783642055362
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 270
Dimensions 155 × 235 × 14 mm   ·   394 g
Language German  

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