Ion Implantation and Synthesis of Materials - Michael Nastasi - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783540236740 - August 9, 2006
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Michael Nastasi
Ion Implantation and Synthesis of Materials 2006 edition

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Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.

263 pages, 131 black & white illustrations, 10 black & white tables, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released August 9, 2006
ISBN13 9783540236740
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 263
Dimensions 242 × 165 × 27 mm   ·   517 g
Language English   German  

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