Ion Implantation and Synthesis of Materials - Michael Nastasi - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642062599 - February 12, 2010
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Michael Nastasi
Ion Implantation and Synthesis of Materials Softcover reprint of hardcover 1st ed. 2006 edition

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Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.

263 pages, 131 black & white illustrations, 10 black & white tables, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released February 12, 2010
ISBN13 9783642062599
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 263
Dimensions 155 × 235 × 14 mm   ·   394 g
Language English  

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