Microsystem Technology and Microrobotics - Sergej Fatikow - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783540606581 - March 20, 1997
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Sergej Fatikow
Microsystem Technology and Microrobotics 1997 edition

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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices.

408 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released March 20, 1997
ISBN13 9783540606581
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 408
Dimensions 156 × 234 × 23 mm   ·   734 g
Language English  

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