Microsystem Technology and Microrobotics - Sergej Fatikow - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642082320 - December 3, 2010
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Sergej Fatikow
Microsystem Technology and Microrobotics Softcover reprint of the original 1st ed. 1997 edition

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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices.

408 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released December 3, 2010
ISBN13 9783642082320
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 408
Dimensions 155 × 235 × 21 mm   ·   589 g
Language English  

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