Metal Impurities in Silicon-Device Fabrication - Springer Series in Materials Science - Klaus Graff - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783540642138 - February 18, 2000
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Klaus Graff
Metal Impurities in Silicon-Device Fabrication - Springer Series in Materials Science 2nd rev. edition

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This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. This new edition includes important recent data and many new tables.

270 pages, XV, 270 p.

Media Books     Hardcover Book   (Book with hard spine and cover)
Released February 18, 2000
ISBN13 9783540642138
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 270
Dimensions 155 × 235 × 238 mm   ·   521 g
Language English  

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