Metal Impurities in Silicon-Device Fabrication - Springer Series in Materials Science - Klaus Graff - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642629655 - October 21, 2012
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Klaus Graff
Metal Impurities in Silicon-Device Fabrication - Springer Series in Materials Science 2nd ed. 2000. Softcover reprint of the original 2n edition

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This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. This new edition includes important recent data and many new tables.

270 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released October 21, 2012
ISBN13 9783642629655
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 270
Dimensions 155 × 235 × 16 mm   ·   412 g
Language English  

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