Low Dielectric Constant Materials for IC Applications - Springer Series in Advanced Microelectronics - Paul S Ho - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783540678199 - November 14, 2002
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Paul S Ho
Low Dielectric Constant Materials for IC Applications - Springer Series in Advanced Microelectronics 2003 edition

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Low dielectric constant materials are an important component of microelectronic devices. Topics include: Organic dielectric materials, Inorganic dielectric materials, Composite dielectric materials, Metrology and characterization techniques, Integration, Reliability.

329 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released November 14, 2002
ISBN13 9783540678199
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 310
Dimensions 155 × 235 × 19 mm   ·   594 g
Language German  
Editor Ho, Paul S.
Editor Lee, Wei William
Editor Leu, Jihperng

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